Beilstein J. Nanotechnol.2018,9, 224–232, doi:10.3762/bjnano.9.24
, silver crystal growth presents a strong dependency on electron dose and precursor refreshment.
Keywords: focused electron beam induced deposition; lowvolatilityprecursor; silver; Introduction
The fabrication of defined patterns in the nanometer regime demands techniques with high lateral resolution
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Figure 1:
Scanning electron micrographs of deposits from AgO2CC2F5 on bulk 200 nm SiO2/Si using a 25 keV/0.25...